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A high rigidity is the fundamental quality derived from the honeycomb design. The steel honeycomb surface table employs a single-step honeycomb structure to improve the rigidity.
Omni directional three-dimensional air spring features excellent vibration isolating performance.
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Optical Experiments |
Interferometer Experiments |
Interferometer |
| Hologram |
STM(AFM) |
Precision Measurement Instruments |
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Download DXF/PDF Data of the Plan |
| SPEC |
AS-1007
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AS-1010
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AS-1207
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AS-1209
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AS-1210
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AS-1510
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AS-1512
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| Natural Frequency |
1.2〜1.8Hz(Vertical) 0.6〜0.8Hz(Horizontal) |
| Vibration Isolating Method |
High-grade omni directional three-dimensional air spring |
| Level Retention Method |
Mechanical valve auto leveling sensor (Regulator pressure setting: 0.25Mpa） |
| Total Height H(mm) |
750 |
800 |
| Size of Surface Table(WxD)(mm) |
1000x700 |
1000x1000 |
1200x700 |
1200x900 |
1200x1000 |
1500x1000 |
1500x1200 |
| Table Thickness T(mm) |
109 |
209 |
| Inner Structure |
Steel honeycomb structure |
| Top Surface |
M6 tapping, 25mm from the edge
Drop-prevention bottom structure for clean room
Ferromagnetic stainless steel SUS430, 5Tmm |
| Side Wall |
Vinyl Leather-cloth |
| Bottom Surface |
Stainless steel 4Tmm |
| Max. Loading Capacity(kg) |
150 |
300 |
| Weight(kg) |
142 |
176 |
155 |
194 |
203 |
313 |
350 |
Accessories
Included |
Piping tube(φ6mmx5m),One-touch control joint PT1/4 male screw |
| Option |
Concentrated exhaust outlet, BA stainless steel(Side Wall)
Drop-preventive bottom structure |
| SPEC |
AS-1809
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AS-1810
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AS-1812
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AS-2010
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AS-2012
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AS-2412
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AS-2415
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| Natural Frequency |
1.2〜1.8Hz(Vertical) 0.6〜0.8Hz(Horizontal) |
| Vibration Isolating Method |
High-grade omni directional three-dimensional air spring |
| Level Retention Method |
Mechanical valve auto leveling sensor (Regulator pressure setting: 0.25Mpa） |
| Total Height H(mm) |
800 |
| Size of Surface Table(WxD)(mm) |
1800x900 |
1800x1000 |
1800x1200 |
2000x1000 |
2000x1200 |
2400x1200 |
2400x1500 |
| Table Thickness T(mm) |
209 |
210 |
| Inner Structure |
Steel honeycomb structure |
| Top Surface |
M6 tapping, 25mm from the edge
Drop-prevention bottom structure for clean room
Ferromagnetic stainless steel SUS430, 5Tmm |
| Side Wall |
Vinyl Leather-cloth |
| Bottom Surface |
Stainless steel 4Tmm |
| Max. Loading Capacity(kg) |
300 |
500 |
| Weight(kg) |
357 |
371 |
393 |
374 |
420 |
570 |
660 |
Accessories
Included |
Piping tube(φ6mmx5m),One-touch control joint PT1/4 male screw |
| Option |
Concentrated exhaust outlet, BA stainless steel(Side Wall)
Drop-preventive bottom structure |
| SPEC |
AS-3012
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AS-3015
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AS-3612
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AS-3615
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AS-4012
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AS-4015
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| Natural Frequency |
1.2〜1.8Hz(Vertical) 0.6〜0.8Hz(Horizontal) |
| Vibration Isolating Method |
High-grade omni directional three-dimensional air spring |
| Level Retention Method |
Mechanical valve auto leveling sensor (Regulator pressure setting: 0.25Mpa） |
| Total Height H(mm) |
800 |
| Size of Surface Table(WxD)(mm) |
3000x1200 |
3000x1500 |
3600x1200 |
3600x1500 |
4000x1200 |
4000x1500 |
| Table Thickness T(mm) |
309 |
310 |
309 |
310 |
309 |
310 |
| Inner Structure |
Steel honeycomb structure |
| Top Surface |
M6 tapping, 25mm from the edge
Drop-prevention bottom structure for clean room
Ferromagnetic stainless steel SUS430, 5Tmm |
| Side Wall |
Vinyl Leather-cloth |
| Bottom Surface |
Stainless steel 4Tmm |
| Max. Loading Capacity(kg) |
500 |
| Weight(kg) |
700 |
855 |
945 |
1100 |
1030 |
1190 |
Accessories
Included |
Piping tube(φ6mmx5m),One-touch control joint PT1/4 male screw |
| Option |
Concentrated exhaust outlet, BA stainless steel(Side Wall)
Drop-preventive bottom structure |
| SPEC |
AS-5012
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AS-5015
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AS-6012
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AS-6015
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| Natural Frequency |
1.2〜1.8Hz(Vertical) 0.6〜0.8Hz(Horizontal) |
| Vibration Isolating Method |
High-grade omni directional three-dimensional air spring |
| Level Retention Method |
Mechanical valve auto leveling sensor (Regulator pressure setting: 0.25Mpa） |
| Total Height H(mm) |
800 |
| Size of Surface Table(WxD)(mm) |
5000x1200 |
5000x1500 |
6000x1200 |
6000x1500 |
| Table Thickness T(mm) |
409 |
410 |
409 |
410 |
| Inner Structure |
Steel honeycomb structure |
| Top Surface |
M6 tapping, 25mm from the edge
Drop-prevention bottom structure for clean room
Ferromagnetic stainless steel SUS430, 5Tmm |
| Side Wall |
Vinyl Leather-cloth |
| Bottom Surface |
Stainless steel 4Tmm |
| Max. Loading Capacity(kg) |
1000 |
| Weight(kg) |
1434 |
1670 |
1650 |
1928 |
Accessories
Included |
Piping tube(φ6mmx5m),One-touch control joint PT1/4 male screw |
| Option |
Concentrated exhaust outlet, BA stainless steel(Side Wall)
Drop-preventive bottom structure |
※M6-25mm matrix spec has T at the end of model number.(EX:AS-****T)
※Clean room spec has C at the end of model number.
(EX:AS-****C)
JVI Nippon Boushin Industry co.,Ltd 1086-1 Otsuka, Numazu-shi, Shizuoka, 410-0306, Japan
TEL：055-969-2620 FAX：055-969-2621 e-mail：info@boushin.com |
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